top of page
Características e Aplicações
Features
-
Atmospheric pressure measurement 5x10-² Pa;
-
Atmospheric pressure adjustment and zero point adjustment done with one-touch;
-
Less cables, more space: combined sensor and controller;
-
Operates with DC 24V input;
-
Pressure is 0 to 10V Log output;
-
Better visibility: LED Error verification;
-
Sensor unit easily replaced;
-
2 set points output (SW1-1);
-
RS232C/RS485 communication (only SW1-2);
-
In conformity with CE.
Applications
-
Process control in low vacuum processes such as for semiconductor, optics, electronic parts manufacturing systems; in low vacuum range processes for industrial equipment such as vacuum furnaces and more; in low vacuum systems that require multiple process chambers, such as in-line sputtering, single wafer processing equipment.
Further specifications
bottom of page

