top of page

Gauges
G-TRAN 
SP1 Series

This integrated Pirani gauge includes the WP sensor head and circuits, functioning on the range of 3000 to 0.4Pa (22 to 3 x 10-³ torr/ 3 to 4 x 10-³mbar).

SP1 Series is economical in both size (it saves space) and cost (no display included).

sp1

Image: ULVAC, Inc. 

Características e Aplicações

Features

  • Fewer costs and more space, in case you don’t have a pressure display device (lower costs associated with vacuum gauge, less space by minimizing the control panel and wiring circuits);

  • Sensor heads are easily replaced;

  • Resistant to corrosion (platinum material);

  • It’s possible to use WP Series Gauge heads – you can use current gauge heads (WP-01, 02, 03, 16) without modification;

  • Control output signal: use of 2 set point is possible;

  • Output signal: pressure reading is 0 to 5V output (non-linear);

  • Supply voltage: unit operates with a DC24V input.

Applications

  • Process control in the low vacuum range of vacuum equipment (such as for semiconductor, optics, electronic parts manufacturing); in the low vacuum range of industrial equipment (such as vacuum furnaces and more); in the low pressure range for vacuum systems with multiple process chambers (such as in-line sputtering and single wafer processing equipment).

Further specifications

2.jpg

Request for quotation

We'll attentively evaluate your company's needs.

We are currently active in Brazil and South America. If you wish to see more details on quotations or proceed, click on more.

bottom of page